Nano Systems Integration

The Nano Systems Integration group is devoted to fabricating and understanding nanostructures, particularly the integration of nano- and microsystems, where the microsystems form the bridge connecting nanostructures to the macroscopic world. Nanostructures, with their huge surface-to-volume ratio, offer great potential in applications such as ultra-sensitive sensors or catalysts.One focus of the group is the direct integration of carbon nanotubes (CNT) in silicon microstructures. The resistive heating of Si micro-bridges enables the localized growth of CNT directly on Si structures, while the substrate is kept at the ambient temperature, which makes it CMOS-compatible. The ultimate goal is to be able to add patterned nano-functionality to integrated CMOS/ MEMS devices in a standardized wafer-level, room-temperature, cost-effective process.

The group is also working with nanoporous materials, in particular TiO2, with a focus on variety of applications such as hydrogen sensors and solar cells. The photocatalytic properties of nanoporous TiO2 can be used as sensing element in microsystems, as well as for large-scale decomposition of organic pollutants or conversion of CO2 to organic molecules.

(Knut Aasmundtveit)